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RMS VISION SYSTEMS Products |
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PRODUCTS |
RMS Vision Systems Inc. USA | TEL 805-222-5430 |
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Optical Metrology Systems |
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The NGS Series metrology systems are designed for applications where automated optical defect detection and precision dimensional measurements on wafers and other parts are required. They are well suited for dual use as production tools or versatile process development systems. These systems offer a choice of high end microscope (Olympus/Nikon/Leica), BF/ DF/ DIC illumination, and 0.1 or 0.02 micron part staging. There are several configurations available depending on your requirements: For example the NGS3500L–CD/OVR is optimized for Optical CD and Overlay metrology applications required for lithography process control. The bench top NGS 3500Z is ideal for cost-sensitive applications such semi-automatic defect review stations. |
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The YIS Series metrology systems are designed for wafer substrate inspection, specifically for detection of crystal dislocations, Slip and other defects. The YIS-300 (300 mm wafers) and YIS-200 (200 mm wafers) utilize advanced Makyoh optics technology (Magic Mirror). |
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